Semiconductors
10 lithography engineering experts
These ten professionals have held lithography and photolithography engineering roles inside semiconductor manufacturers, from process engineering to department and director leadership. A reader can learn how lithography engineering teams are organized and run inside semiconductor fabs.
Professionals to explore
01—10Gloria Chen
LinkedInExperience: Lithography Overlay Automation Lead_Principle Engineer · Micron Technology
Lithography Overlay Automation Lead_Principle Engineer at Micron Technology since 2018, where the profile says the person leads a team specialized in newest generation lithography technologies including overlay design and control and automation. Former Sr. Photolithography Engineer (2015–2018) and Photolithography Engineer (2011–2015) at Micron Technology.
Hao Chen
LinkedInExperience: DRAM Photolithography Process Manager · Micron Technology
Former DRAM Photolithography Process Manager (2018–2020) and 3D NAND Photolithography Process Manager (2016–2018) at Micron Technology, and OCT Photo Process Senior Manager at Micron Technology since 2020. Former 3D NAND Photolithography Senior Process Engineer at Micron Technology (2014–2016).
Haw Min Tay
LinkedInExperience: Photolithography Section Manager · STMicroelectronics
Former Photolithography Section Manager at STMicroelectronics (2019–2026), a role the profile says involved leading a team of photolithography process engineers. Process Engineering Senior Section Manager at STMicroelectronics since 2026. The listing also shows Photolithography Process Engineering (AG300 Italy) at STMicroelectronics (2022–2023).
Jack Jiang
LinkedInExperience: Lithography Director · GlobalFoundries
Former Lithography Director at GlobalFoundries (2023–2025). The profile says the role directed global strategy and execution of EUV and e-beam lithography platforms and led cross-functional teams in process development, yield improvement and tool evaluation. Former Senior Manager (2015–2023) and Section Manager (2012–2015) at GlobalFoundries.
Kevin DSouza
LinkedInExperience: Lithography Department Manager · Intel
Lithography Department Manager at Intel since 2022, and Director of Engineering at Intel since 2003. The profile headline describes this person as Photolithography Director at Intel Corporation, and the profile tags the department manager role at manager level and the Director of Engineering role at director level.
LiChieh Chang
LinkedInExperience: Sr. Manager, Photolithography · Micron Technology
Sr. Manager, Photolithography at Micron Technology since 2024. Former Manager, Engineering (Module Team Leader - ASML) at Intel (2019–2021), Manager, Engineering (Lithography) at TSMC Washington (2013–2019) and Senior Process Engineer (Lithography) at TSMC Washington (2007–2011).
Nathan Neal
LinkedInExperience: Senior Manager Deputy Director - Lithography · GlobalFoundries
Senior Manager Deputy Director - Lithography at GlobalFoundries since 2025, a role the profile ties to lithography equipment and reticle process. Former Sr. Section Manager - Lithography Equipment Engineering (2018–2025) and MTS Equipment Engineer (2014–2018) at GlobalFoundries, and Process Engineer at Intel (2006–2014).
Sridhar Ramaswamy
LinkedInExperience: Litho Engineering Manager · Intel
Former Litho Engineering Manager at Intel (2019–2020), a role the profile describes as leading the front-end lithography module. Former Senior Engineer Scientist, Photolithography, Semiconductor Research and Development Center at IBM (2002–2015) and Photolithography Manager at Micron Technology (1996–2001).
Stephan Klopcic
LinkedInExperience: Director of MDCE Lithography · Intel
Director of MDCE Lithography at Intel since 2025, a role the profile describes as covering yield and performance improvement, lithography process optimization and customization. The listing also shows Group Leader Principal Engineer at Intel since 1999.
Terry Buckley
LinkedInExperience: Director of Engineering Lithography · Intel
Former Director of Engineering Lithography at Intel (2021–2025). The profile says that as the Lithography Department Manager this person led both the EUV and DUV process engineering and manufacturing teams, and that the team installed and ramped EUV technology in Ireland. Former Senior Engineering Manager Etch at Intel (2013–2021).
Choose the right perspective
Match the person's seat to your question, since leading a lithography department differs from hands-on process or equipment engineering on specific layers. Also consider the product and fab setting behind your decision, because memory, logic and specialty fabs raise different lithography problems.
Questions to take into the conversation
- 01How do you structure a lithography engineering team across process, equipment and metrology responsibilities?
- 02What are the hardest overlay and critical dimension control problems you have faced when ramping a new node or layer?
- 03How do you work with scanner, track and materials suppliers when a lithography problem threatens yield or output?
Reaching lithography engineering experts
How can I contact one of these lithography engineering experts?
Pick one of the 10 people on this page and choose "Book a paid call", or describe your project to find others. You offer a fee for a 15-minute call or a written answer, Instant Expert finds the person's work email and sends the invitation, and they decide whether to accept. The list covers 4 companies, including Micron Technology, STMicroelectronics and GlobalFoundries, based on profile data retrieved on October 4, 2026. Being listed here doesn't mean someone has agreed to take calls.
How much does it cost to reach lithography engineering experts?
You choose the offer, starting at $5 per person. It includes Instant Expert's 20% fee, so an offer that pays the person $100 costs you $125. You're charged only when the person books the call or sends the answer.
What if they don't reply?
You pay nothing. Instant Expert sends follow-up reminders, and if the person hasn't booked or answered within 7 days, the request expires and any hold on your card is released. You can invite several of the 10 people on this list at once and cap your total spend, so you pay only for the ones who accept.
About this directory
This is a professional research starting point based on business profile data retrieved on . Titles and companies reflect that source snapshot and may describe past or present roles. Check the linked profiles for current details. Inclusion does not imply Instant Expert membership or availability.
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